Semiconductor manufacturing technology / Chue San Yoo.
نوع المادة :
نصالسلاسل:Advanced series in electrical and computer engineering ; v. 13.الناشر:Hackensack, N.J. ; London : World Scientific, [2008]تاريخ حقوق النشر: ©2008وصف:xii, 470 pages : illustrations ; 24 cmنوع المحتوى:- text
- unmediated
- volume
- 9789812568236
- 9812568239
- TK7871.85 .Y66 2008
| نوع المادة | المكتبة الحالية | رقم الطلب | رقم النسخة | حالة | تاريخ الإستحقاق | الباركود | |
|---|---|---|---|---|---|---|---|
كتاب
|
UAE Federation Library | مكتبة اتحاد الإمارات General Collection | المجموعات العامة | TK7871.85 .Y66 2008 (إستعراض الرف(يفتح أدناه)) | C.1 | Library Use Only | داخل المكتبة فقط | 30020000010594 |
Browsing UAE Federation Library | مكتبة اتحاد الإمارات shelves, Shelving location: General Collection | المجموعات العامة إغلاق مستعرض الرف(يخفي مستعرض الرف)
| TK7871.65 .Y44 2008 The essence of dielectric waveguides / | TK7871.67.M53 S74 2010 LONRS : low-noise receiving systems : performance and analysis toolkit / | TK7871.85 .R56 2002 High-speed heterostructure devices : from device concepts to circuit modeling / | TK7871.85 .Y66 2008 Semiconductor manufacturing technology / | TK7871.9 .S645 2012 Synchronous precharge logic / | TK7871.9 .S645 2012 Synchronous precharge logic / | TK7872.D48 F35 2011 Building wireless sensor networks / |
Includes bibliographical references and index.
Building blocks for integrated circuits -- Thermal oxidation -- Gas kinetics and plasma physics -- Chemical vapor deposition -- Plasma-enhanced chemical vapor deposition and etching -- Pattern transfer : photolithography -- Pattern generation -- Doping technology -- Metallization and silicidation -- Planarization and CMP technology -- Copper and low-k.
"This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format."--Jacket.
