Introductory MEMS : fabrication and applications / Thomas M. Adams, Richard A. Layton.
نوع المادة : نصالناشر:New York : Springer, [2010]تاريخ حقوق النشر: ©2010وصف:xv, 444 pages : illustrations (some color) ; 25 cmنوع المحتوى:- text
- unmediated
- volume
- 9780387095103
- 0387095101
- TK7875 .A33 2010
نوع المادة | المكتبة الحالية | رقم الطلب | رقم النسخة | حالة | تاريخ الإستحقاق | الباركود | |
---|---|---|---|---|---|---|---|
كتاب | UAE Federation Library | مكتبة اتحاد الإمارات General Collection | المجموعات العامة | TK7875 .A33 2010 (إستعراض الرف(يفتح أدناه)) | C.1 | Library Use Only | داخل المكتبة فقط | 30020000012760 |
Browsing UAE Federation Library | مكتبة اتحاد الإمارات shelves, Shelving location: General Collection | المجموعات العامة إغلاق مستعرض الرف(يخفي مستعرض الرف)
TK7874.78 .W57 2012 Wireless radio-frequency standards and system design : advanced techniques / | TK7874.8 .M58 2012 Introduction to nanoelectronics : science, nanotechnology, engineering, and applications / | TK7874.84 .M64 2015 Nanoelectronic mixed-signal system design / | TK7875 .A33 2010 Introductory MEMS : fabrication and applications / | TK7875 .V57 2011 VLSI micro- and nanophotonics : science, technology, and applications / | TK7876 .D43 2006 Transmission line matrix in computational mechanics / | TK7878 .M685 2007 Electrical and mechanical services in high rise buildings : design and estimation manual / |
Includes bibliographical references and index.
Introduction -- Fabrication: The substrate and adding material to it ; Creating and transferring patterns : photolithography ; Creating structures : micromachining ; Solid mechanics -- Applications: Thinking about modeling ; MEMS transducers ; Piezoresistive transducers ; Capacitive transducers ; Piezoelectric transducers ; Thermal transducers ; Introduction to microfluidics -- Microfabrication laboratories: Microfabrication laboratories.
This title is a practical introduction to MEMS for advanced undergraduate and graduate students. It introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.