عرض عادي
Introductory MEMS : fabrication and applications / Thomas M. Adams, Richard A. Layton.
نوع المادة :
نصالناشر:New York : Springer, [2010]تاريخ حقوق النشر: ©2010وصف:xv, 444 pages : illustrations (some color) ; 25 cmنوع المحتوى:- text
- unmediated
- volume
- 9780387095103
- 0387095101
- TK7875 .A33 2010
المحتويات:
ملخص:This title is a practical introduction to MEMS for advanced undergraduate and graduate students. It introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
Introduction -- Fabrication: The substrate and adding material to it ; Creating and transferring patterns : photolithography ; Creating structures : micromachining ; Solid mechanics -- Applications: Thinking about modeling ; MEMS transducers ; Piezoresistive transducers ; Capacitive transducers ; Piezoelectric transducers ; Thermal transducers ; Introduction to microfluidics -- Microfabrication laboratories: Microfabrication laboratories.
| نوع المادة | المكتبة الحالية | رقم الطلب | رقم النسخة | حالة | تاريخ الإستحقاق | الباركود | |
|---|---|---|---|---|---|---|---|
كتاب
|
UAE Federation Library | مكتبة اتحاد الإمارات General Collection | المجموعات العامة | TK7875 .A33 2010 (إستعراض الرف(يفتح أدناه)) | C.1 | Library Use Only | داخل المكتبة فقط | 30020000012760 |
Includes bibliographical references and index.
Introduction -- Fabrication: The substrate and adding material to it ; Creating and transferring patterns : photolithography ; Creating structures : micromachining ; Solid mechanics -- Applications: Thinking about modeling ; MEMS transducers ; Piezoresistive transducers ; Capacitive transducers ; Piezoelectric transducers ; Thermal transducers ; Introduction to microfluidics -- Microfabrication laboratories: Microfabrication laboratories.
This title is a practical introduction to MEMS for advanced undergraduate and graduate students. It introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
